BORON-11 TRIFLUORIDE
Boron-11 trifluoride (11BF3) is a form of stable isotope of Boron-11. It is enriched from naturally occurring abundance up to 99.5 at%. Boron-11 trifluoride is one of stable isotopes produced by our company for semiconductor industry.
Enriched Boron Trifluoride (11BF3) is an isotopically enriched material used for silicon doping. It is produced to have more than 99 % purity and 99.5% 11B enrichment. 11B enriched boron trifluoride contains 25% more boron-11 than naturally occurring materials. Additionally, this product is used in the ion implantation process as the most commercially preferred p-dopant for silicon.
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11BF3 is a non-flammable compressed gas packaged and shipped in cylinders under high pressure. It is one of the strongest Lewis acids, which are also known as electron pair acceptors. In gas form, it reacts with chemicals containing oxygen, nitrogen, sulfur, and other electron pair donors to form addition or coordination compounds. فلورید بور-11 ایزوتوپ بور-11 فرآوری عناصر اکسیر
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Boron-11 Enriched Boron Trifluoride Properties |
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Compound Formula |
11BF3 |
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CAS Number |
20654-88-0 |
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Enrichment |
99.5% atomic |
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Chemical Purity |
≥ 99 wt.% |
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Molecular Weight |
67.96 @ 99% 10 B |
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Appearance |
Clear in an inert atmosphere. Forms a dense white cloud |
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Boiling Point |
-100 °C at 1,013 hPa |
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Melting Point |
-128.4 °C |
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Density |
1.139 g/cm 3 |
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IUPAC Name |
Trifluoro borane |
Resources
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Boron-11 Trifluoride Technical Data Sheet
Packaging
11BF3 is a non-flammable compressed gas packaged and shipped in cylinders under high pressure. Exir offers Boron-11 Trifluoride in returnable cylinders. When empty, these cylinders weigh approximately 59 kg and 51 kg respectively. Each cylinder is filled with about 25 kg at a pressure of approximately 9500 kPa.
Storage, Handling and Safety
Cylinders in 11BF3 service must be requalified by hydrostatic test every five years. Cylinders must be supported and secured to a solid structure to prevent them from tipping over.
The valve cap should always be in place when the cylinder is not in use or when the cylinder is being moved. Full cylinders should be stored separately from empty cylinders in areas clearly marked for those purposes.
The cylinder valve has a 0.825" - 14 National Gas Thread Outlet connection with a lefthanded external thread (designated as CGA 330). A full-face Kel-F® (Neoflon®) gasket is provided in the outlet cap to provide a seal. The outlet cap should be in place whenever the cylinder is not connected to the process, to minimize the accumulation of moisture in the valve outlet and subsequent formation of corrosion scale in the valve discharge port. Cylinders should be connected to the process using a stainless steel flexible tubing pigtail with a welded CGA 330 female fitting to mate with the cylinder valve outlet. The process and connection may be of any appropriate high pressure fitting. Flexible hoses should not be used in 10BF3 service, CGA fittings should be sealed using a Kel-F® (Neoflon®) or PTFE gasket.
Do not apply heat to the outside of the cylinder or otherwise attempt to completely empty the cylinder. A nominal positive pressure (less than 20 psig) should be left in the cylinder.
